• Description
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Description

The multi-heating zone tube furnace is composed of heating system, temperature control system, working tube and sealing kit. It can work under vacuum or atmosphere condition to meet various CVD process requirements. Multiple heating zones can help to achieve high uniformity temperature field conditions, and can also be applied to material temperature field gradient experiments. This product is widely used in sintering and heat treatment of graphene materials, lithium battery positive and negative electrode materials, semiconductor materials, new energy and new material industries.

Features

Furnace shell

1. The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.
2. The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low
3. Vertical use mode, side open cover structure, easy to operate

Refractory material

Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption

Heating system

1. High-quality HRE spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life
2. Ring heating by resistance wire to achieve good uniformity in the furnace
3. The furnace is divided into multiple heating zones, and each heating zone can be heated independently.

Temperature Control Panel

1. Advanced controllers that meet complex process requirements
2. Programmable 30 program segments to realize automatic curve temperature control
3. Over temperature and fault alarm, automatic safety protection

Vacuum Atmosphere Function

1. With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube
2. High-quality alumina working tube, or metal or quartz glass working tube can be selected to adapt to different working conditions

Technical Parameter